Synchrotron Laboratory for Micro And Nano Devices
Overview Beamline Webpage
The SyLMAND facility at the Canadian Light Source is dedicated to research in and fabrication of high aspect ratio microstructures. The X-ray beamline is used to pattern thick polymer resists. The supporting clean room houses facilities for primary UV patterning and fabrication of X-ray masks, seed layer metallization, wet chemical processing, gold and nickel electroplating, inspection and metrology. A large variety of devices can be fabricated in different applications such as micro-electric-mechanical systems (MEMS), biomedical and optics/photonics.